Low-temperature vacuum furnaces are specialized devices designed for heat treatment of materials at lower temperatures, typically in the range of 400 – 700 °C, in an oxygen-free environment. The use of vacuum technology minimizes oxidation, preserving the high purity and quality of the materials being processed. These furnaces are primarily used in the electronics, aerospace, pharmaceutical manufacturing, and other industries.
A common application is for surface cleaning of components that are used in assemblies for cleanroom environments, or for long-term annealing of copper components to remove hydrogen embrittlement.
Operating Temperatures | |
Maximum Temperature | 700 °C |
Chamber Dimensions | |
Diameter | 755 mm |
Height | 850 mm |
Chamber Volume | 380 l |
Work Area of the Load | |
Diameter | 510 mm |
Height | 640 mm |
Working Pressures | |
High Vacuum | 1×10-6 mbar |
Machine Dimensions and Weight | |
Height | 2 600 mm |
Width | 1 150 mm |
Depth | 2 000 mm |
Machine Weight | 1 450 kg |
Other Parameters | |
Pumping System | Turbo + Roots Pump |
Machine Control | PLC - SIEMENS |
Heating System | 1-zone |
Power Supply | 400V / 5×63A |
Power Consumption | 32 kW |
Operating Temperatures | |
Maximum Temperature | 700 °C |
Chamber Dimensions | |
Diameter | 650 mm |
Height | 730 mm |
Chamber Volume | 240 l |
Work Area of the Load | |
Diameter | 450 mm |
Height | 680 mm |
Working Pressures | |
Chamber Working Pressure | 1×10-7 mbar |
UHV Working Pressure | 1×10-10 mbar |
Machine Dimensions and Weight | |
Height | 2 190 mm |
Width | 1 200 mm |
Depth | 2 000 mm |
Machine Weight | 2 200 kg |
Other Parameters | |
Pumping System | Turbo + Scroll Pump |
Machine Control | PLC - SIEMENS |
Heating System | 1-zone |
Power Supply | 400V / 5×40A |
Power Consumption | 26 kW |
Operating Temperatures | |
Maximum Temperature | 700 °C |
Chamber Dimensions | |
Diameter | 745 mm |
Height | 930 mm |
Chamber Volume | 510 l |
Work Area of the Load | |
Diameter | 655 mm |
Height | 680 mm |
Working Pressures | |
Chamber Working Pressure | 1×10-7 mbar |
UHV Working Pressure | 1×10-10 mbar |
Machine Dimensions and Weight | |
Height | 2 200 mm |
Width | 1 200 mm |
Depth | 2 300 mm |
Machine Weight | 2 850 kg |
Other Parameters | |
Pumping System | Turbo + Scroll Pump |
Machine Control | PLC - SIEMENS |
Heating System | 1-zone |
Power Supply | 400V / 5×50A |
Power Consumption | 30 kW |
Operating Temperatures | |
Maximum Temperature | 700 °C |
Chamber Dimensions | |
Diameter | 1,145 mm |
Height | 800 mm |
Chamber Volume | 820 l |
Work Area of the Load | |
Diameter | 865 mm |
Height | 740 mm |
Working Pressures | |
Chamber Working Pressure | 1×10-7 mbar |
UHV Working Pressure | 1×10-10 mbar |
Machine Dimensions and Weight | |
Height | 2,245 mm |
Width | 1,430 mm |
Depth | 2,560 mm |
Machine Weight | 3,550 kg |
Other Parameters | |
Pumping System | Turbo + Scroll Pump |
Machine Control | PLC - SIEMENS |
Heating System | 1-zone |
Power Supply | 400V / 5×50A |
Power Consumption | 32 kW |