Low-Temperature Furnaces

Low-temperature vacuum furnaces are specialized devices designed for heat treatment of materials at lower temperatures, typically in the range of 400 – 700 °C, in an oxygen-free environment. The use of vacuum technology minimizes oxidation, preserving the high purity and quality of the materials being processed. These furnaces are primarily used in the electronics, aerospace, pharmaceutical manufacturing, and other industries.
A common application is for surface cleaning of components that are used in assemblies for cleanroom environments, or for long-term annealing of copper components to remove hydrogen embrittlement.

LVF5164

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Parameters Low temperature furnaces

Operating Temperatures
Maximum Temperature 700 °C
Chamber Dimensions
Diameter 755 mm
Height 850 mm
Chamber Volume 380 l
Work Area of the Load
Diameter 510 mm
Height 640 mm
Working Pressures
High Vacuum 1×10-6 mbar
Machine Dimensions and Weight
Height 2 600 mm
Width 1 150 mm
Depth 2 000 mm
Machine Weight 1 450 kg
Other Parameters
Pumping System Turbo + Roots Pump
Machine Control PLC - SIEMENS
Heating System 1-zone
Power Supply 400V / 5×63A
Power Consumption 32 kW

Visualization of the machine

Product list LVF5164 download

LVF4568Presented solution for Pfeiffer Vacuum

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Parameters Low temperature furnaces

Operating Temperatures
Maximum Temperature 700 °C
Chamber Dimensions
Diameter 650 mm
Height 730 mm
Chamber Volume 240 l
Work Area of the Load
Diameter 450 mm
Height 680 mm
Working Pressures
Chamber Working Pressure 1×10-7 mbar
UHV Working Pressure 1×10-10 mbar
Machine Dimensions and Weight
Height 2 190 mm
Width 1 200 mm
Depth 2 000 mm
Machine Weight 2 200 kg
Other Parameters
Pumping System Turbo + Scroll Pump
Machine Control PLC - SIEMENS
Heating System 1-zone
Power Supply 400V / 5×40A
Power Consumption 26 kW

Visualization of the machine

Product list LVF4568 download

LVF6568Presented solution for Pfeiffer Vacuum

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Parameters Low temperature furnaces

Operating Temperatures
Maximum Temperature 700 °C
Chamber Dimensions
Diameter 745 mm
Height 930 mm
Chamber Volume 510 l
Work Area of the Load
Diameter 655 mm
Height 680 mm
Working Pressures
Chamber Working Pressure 1×10-7 mbar
UHV Working Pressure 1×10-10 mbar
Machine Dimensions and Weight
Height 2 200 mm
Width 1 200 mm
Depth 2 300 mm
Machine Weight 2 850 kg
Other Parameters
Pumping System Turbo + Scroll Pump
Machine Control PLC - SIEMENS
Heating System 1-zone
Power Supply 400V / 5×50A
Power Consumption 30 kW

Visualization of the machine

Product list LVF6568 download

LVF8674Presented solution for Pfeiffer Vacuum

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Parameters Low temperature furnaces

Operating Temperatures
Maximum Temperature 700 °C
Chamber Dimensions
Diameter 1,145 mm
Height 800 mm
Chamber Volume 820 l
Work Area of the Load
Diameter 865 mm
Height 740 mm
Working Pressures
Chamber Working Pressure 1×10-7 mbar
UHV Working Pressure 1×10-10 mbar
Machine Dimensions and Weight
Height 2,245 mm
Width 1,430 mm
Depth 2,560 mm
Machine Weight 3,550 kg
Other Parameters
Pumping System Turbo + Scroll Pump
Machine Control PLC - SIEMENS
Heating System 1-zone
Power Supply 400V / 5×50A
Power Consumption 32 kW

Visualization of the machine

Product list LVF8674 download